Nava Setter: Electroceramic-based MEMS: Fabrication-technology and Applications

Electroceramic-based MEMS: Fabrication-technology and Applications



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Author: Nava Setter
Number of Pages: 414 pages
Published Date: 06 Dec 2010
Publisher: Springer-Verlag New York Inc.
Publication Country: New York, NY, United States
Language: English
ISBN: 9781441936042
Download Link: Click Here
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